Magnification 6X-1000000X Scanning Electron Microscope 1-3nm
Resolution with Optional BSE,EDS,EBSD and CL
M22004 electron microscope operating software can be switched in
Chinese/English with modular layout. The software supports
real-time simultaneous display of 5 images, 4 channels plus CCD
window, and supports powerful auxiliary functions such as synthesis
of secondary electron image and backscattered electron image,
multi-point size measurement, text annotation of electron
microscope image, vacuum map display, CCD window display, etc., to
meet the individual needs of different users. Automatic functions:
automatic filament, high voltage, focusing, brightness/contrast
adjustment, astigmatism, electron beam centering, automatic
correction of electron gun, fault detection, optional 3D
reconstruction, etc. Saved pictures: 16384x16384pixel BMP, GIF,
TIF, JPG, MNG, ICOCUR, TGA, PCX, JP2, JPC, PGX, RAS, PNM, SKA and
SEM.
Specials:
- Magnification Max 1000000X.
- Signal Detection: Ultra Vacuum Secondary Electron Detector (With
detector perotection function).
- Accelerating Voltage: 0~30KV, High image resolution.
- BSE/EDS/EBSD/CL is optional, for component analysis.
- High Vacuum System.
- Five Axes Encentric Motorized Stage.
| Item | Specification | M22004 |
| Resolution | 1nm@30kV(SE), 3nm@1kV(SE), 2.5nm@30kV(BSE) | ● |
| Magnification | 6X~1000000X, Displayed Magnification: Magnification is defined with
a display size 127mm*211mm | ● |
| Accelerating Voltage | 0~30kV | ● |
Signal Detection
| Ultra Vacuum Secondary Electron Detector (With detector perotection
function) | ● |
| Electron Gun | Schotty Field Emission ELectron Gun | ● |
| Auto Function | Focus,Bright/Contrast,Stigmator,Alignment etc | ● |
| StageSystem/Movement | Five Axes Encentric Motorized Stage | ● |
| X: 0~150mm, Auto | ● |
| Y: 0~150mm, Auto | ● |
| Z: 0~60mm, Auto | ● |
| R: 360°, Auto | ● |
| T: -5°~70°, Auto | ● |
| Max Sample Diameter | 340mm | ● |
| Vacuum system | Fully Automatic: 1 Ion Pump,1 Combined Pump(Getter pump&Ion
pump), 1 TMP, 1RP | ● |
| Optional Detector | BSEEDSEBSDCL | ○ |
| Optional Accessories | Pre-Vacuum Chamber/EBL/Cryo Stage/Nano Manipulator/Tensile Stage/
Control Panel/Track Ball | ○ |
Note: ● means standard, ○ means optional
Low Voltage Image
Gallery
Image Processing Software
