Magnification Max 60,000X Scanning Electron Microscope 15nm
Resolution with Optional EDS
As the basic desktop SEM, M22001 series can meet the basic
experimental needs of most users. It is equipped with SE (secondary
electron) detector and BSE (backscattered electron) detector. The
load platform can be configured with three axes (X, Y, R). The
manual platform can also be upgraded to a five-axis (X, Y, R, Z, T)
automatic platform. The EDS spectrum analyzer can be configured in
all series of products. The products include the following
configurations:
Specials:
- Magnification Max 60,000X.
- Signal Detection: SE Detector+BSE Detector.
- Accelerating Voltage:5kV to 30KV, High image resolution.
- EDS is optional, for component analysis.
- High Vacuum System.
- Tilt Stage configuration (0~45°)( optional).
| Item | Specification | M22001 |
| Resolution | 15nm (30kV, SE Image) | ● |
| 20nm (30kV, BSE Image) | ● |
| Magnification | 30x~60,000x | ● |
| Accelerating Voltage | 5kV to 30kV (5kV/10kV/15kV/20kV/30kV-5 step) | ● |
Signal Detection
| (SEI)-Secondary Electron Image | ● |
| (BSEI)-Backscattered Electron Image | ○ |
| * Multi Detector (SEI+BSEI) | ○ |
| Observation mode | Standard Mode | ● |
| Charge-up reduction mode | ● |
| Electron Gun | Filament type, Pre Centered tungsten filament Cartridge | ● |
| Bias voltage system, Automatic mode | ● |
| Electron gun alignment, Manual mode | ● |
| Lens system | Focus Lens, 2-stage Electromagnetic Condenser Lens | ● |
| Objective Lens, 1-stage Electromagnetic Objective Lens | ● |
| Detector type, SE Detector/ BSE Detector | ● |
| Stage system | Auto or Manual Stage Traverse, 3 axis system, X, Y-axis : 35mm / R-axis: 360° | ● |
| Image shift | Image shift X, Y Image Shift (±150um) | ● |
| Max sample size | 70mm in diameter, 30mm in height | ● |
| Image scanning system | Fast Scan: 320x240 (Scan time: 0.1 sec.) | ● |
| Slow Scan: 640x480 (Scan time: 3 sec.) | ● |
| Photo Mode 1: 1280x960 | ● |
| Photo Mode 2: 2560x1920 | ● |
| Photo Mode 3: 5120x3840 | ● |
| Image format | BMP, JPEG, PNG,TIFF | ● |
| Data display | Magnification, Detector type, Accelerating Voltage, Vacuum mode,
Logo(Text), Date and time, Text marker, scale bar | ● |
| Vacuum system | Fully Automatic Multi mode, High vacuum Rotary Pump/100Liters/min Turbo Molecular Pump/ 70Liters/sec pump down time: less than 3 minutes | ● |
| Control unit system | Mouse, Keyboard PC | ● |
| Software function | Image file open, edit, Save function Length, area, angle measuring parameter initialization, mage capture mode conversion), Archives,
Setting(EDS) | ● |
| Volume | Main Unit-460(W)×600(D)× 950(H)mm……1set
External vacuum pump-400(W)×160(D)×340(H)mm …1set | ● |
| Weight | 99kg | ● |
| Equipment environment | Temperature: 15℃~30℃
Humidity: 70% or less Power source: Single phase 200~240V AC, 1KW, 50/60Hz | ● |
Accessories package: | |
| Pre Centered tungsten filament | 5 pcs/box | ● |
Sample Stage
| 15mm dia. (10 pcs) | ● |
| 25mm dia. (10 pcs) | ● |
| 15mm 45° Tilt (5 pcs) | ● |
| 15mm 90° Tilt (5pcs) | ● |
| Height standard master | 1ea | ● |
| allen wrench | 1set | ● |
| SEM Software CD | 1ea | ● |
| Carbon conductive tape | 1roll | ● |
| scissors | 1ea | ● |
| tweezers | 1ea | ● |
| Tools Box | 1ea | ● |
Note: ● means standard, ○ means optional
The sample test results
We conducted a practical test using a defective screw that was
discarded in the laboratory as a sample. The pictures are as
follows:
Screw, ×47, 30 kV, SE, High Vacuum
×100, 10kV, SE, High Vacuum
×100, 10kV, SE, High Vacuum
×500, 10kV, SE, High Vacuum
×500, 10kV, SE, High Vacuum
×1000, 10kV, SE, High Vacuum
Other Pictures:
Ceramic ×5000 Battery material ×10K
Phytoplankton ×8000 Pearl powder ×1000
